Micromachined ultrasonic motor based on parametric polycrystalline silicon plate excitation

Sensors and Actuators, A: Physical

Volumn 137, Issue 1, 2007, Pages 120-128

  Kaajakari, Ville ^a,c   Lal, Amit ^b,c  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b School of Operations Research and Industrial Engineering   (United States)

^c Wisconsin Electric Machines and Power Electronics Consortium   (United States)

Author keywords

Micromotor; Surface micromachine; Ultrasonic motor

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC EXCITATION; LEAD COMPOUNDS; MICROMACHINING; POLYSILICON; ROTORS;

MICROMOTOR; PIEZOELECTRIC PLATES; SURFACE MICROMACHINE; ULTRASONIC MOTORS;

ULTRASONIC DEVICES;

EID: 34249313689     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.01.020     Document Type: Article

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