Transfer-free fabrication of suspended graphene grown by chemical vapor deposition

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Volumn , Issue , 2012, Pages 19-22

  Lindvall, N ^a   Sun, J ^a   Yurgens, A ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

chemical vapor deposition; graphene; suspended; transfer free

Indexed keywords

COPPER THIN FILM; ELECTRICAL INTERCONNECTS; FORCE SENSOR; GRAPHENE DEVICES; LARGE-SCALE PRODUCTION; NANO ELECTROMECHANICAL SYSTEMS; SUSPENDED; TRANSFER-FREE; TWO-DIMENSIONAL MATERIALS;

CHEMICAL VAPOR DEPOSITION; ELECTRONIC PROPERTIES; FABRICATION; MECHANICAL PROPERTIES; VAPORS;

GRAPHENE;

EID: 84861541798     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2012.6196713     Document Type: Conference Paper

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