Thin TaC layer produced by ion mixing

Surface and Coatings Technology

Volumn 206, Issue 19-20, 2012, Pages 3917-3922

  Barna, Árpád ^a   Kotis, László ^a   Pécz, Béla ^a   Sulyok, Attila ^a   Sáfrán, György ^a   Tóth, Attila L ^a   Menyhárd, Miklós ^a   Kovács, András ^b   Savenko, Alexey ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Defect mediated compound formation; Ion mixing; TaC; TaC coating; Tantalum carbide

Indexed keywords

COATING LAYER; COMPOUND FORMATION; COVER LAYERS; FLUENCES; ION BEAM MIXING; ION ENERGIES; ION FLUENCES; ION MIXING; LAYERED SYSTEMS; REVERSE PROCESS; TAC; TAC COATINGS;

CARBIDES; CARBON; COATINGS; MIXING; STOICHIOMETRY; TANTALUM; TANTALUM CARBIDE; TANTALUM COMPOUNDS;

IONS;

EID: 84861456301     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.03.052     Document Type: Article

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