Thickness measurement of thin polymer films by total internal reflection Raman and attenuated total reflection infrared spectroscopy

Vibrational Spectroscopy

Volumn 61, Issue , 2012, Pages 1-9

  Kivioja, Antti O ^a   Jääskeläinen, Anna Stiina ^a,c   Ahtee, Ville ^b   Vuorinen, Tapani ^a  

^a AALTO UNIVERSITY   (Finland)

^b CENTRE FOR METROLOGY AND ACCREDITATION MIKES   (Finland)

^c VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Attenuated total reflection infrared spectroscopy; Ellipsometry; Thickness; Thin film; Total internal reflection Raman spectroscopy; Ultra thin film

Indexed keywords

ATTENUATED TOTAL REFLECTION INFRARED SPECTROSCOPY; BAND INTENSITY RATIO; POLYSTYRENE FILMS; RAMAN METHODS; SOFT SUBSTRATES; THICKNESS; THIN POLYMER FILMS; TOTAL INTERNAL REFLECTIONS;

ELECTROMAGNETIC WAVE REFLECTION; ELLIPSOMETRY; FILM THICKNESS; INFRARED SPECTROSCOPY; POLYMER FILMS; POLYPROPYLENES; POLYSTYRENES; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SUBSTRATES; THICKNESS GAGES; THICKNESS MEASUREMENT; THIN FILMS; ULTRATHIN FILMS;

REFRACTIVE INDEX;

EID: 84861098840     PISSN: 09242031     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vibspec.2012.02.014     Document Type: Article

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