Substrate effect on the thickness of spin-coated ultrathin polymer film

Applied Physics Letters

Volumn 87, Issue 21, 2005, Pages 1-3

  Cheung, K P ^a   Grover, R ^a   Wang, Y ^a   Gurkovich, C ^a   Wang, G ^a   Scheinbeim, J ^b  

^a RUTGERS UNIVERSITY   (United States)

^b The State University of New Jersey   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; POLYMER FILMS; POWER-LAW MODEL; SUBSTRATE EFFECT;

MATHEMATICAL MODELS; SPIN COATING; SUBSTRATES; ULTRATHIN FILMS;

POLYMERS;

EID: 27844485723     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2133926     Document Type: Article

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