A design methodology for fully integrated MEMS and NEMS Pierce oscillators

Sensors and Actuators, A: Physical

Volumn 172, Issue 1, 2011, Pages 293-300

  Arndt, G ^a   Colinet, E ^a   Arcamone, J ^a   Juillard, J ^b  

^a CEA GRENOBLE   (France)

^b SUPELEC   (France)

Author keywords

CMOS design; MEMS; Methodology; NEMS; Oscillator

Indexed keywords

ACTIVE TRANSISTORS; CLAMPED-CLAMPED BEAM; CMOS DESIGN; CMOS TECHNOLOGY; DESIGN METHODOLOGY; FULLY INTEGRATED; METHODOLOGY; PIERCE OSCILLATOR; PIEZO-RESISTIVE; TRANS-IMPEDANCE GAIN;

CMOS INTEGRATED CIRCUITS; ELECTROSTATIC ACTUATORS; MEMS; NEMS; OSCILLATORS (MECHANICAL); RESONATORS;

DESIGN;

EID: 82755197935     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.06.022     Document Type: Conference Paper

References (8)

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