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Volumn 50, Issue 8, 2012, Pages 1084-1088

White light interferometry for surface profiling with a colour CCD

Author keywords

Fringe analysis; Phase shifting; Single chip colour CCD camera; Surface profiling; White light interferometry

Indexed keywords

FRINGE ANALYSIS; PHASE-SHIFTING; SINGLE-CHIP; SURFACE PROFILING; WHITE-LIGHT INTERFEROMETRY;

EID: 84860666579     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2012.02.002     Document Type: Article
Times cited : (65)

References (14)
  • 1
    • 0001418962 scopus 로고
    • Phase shifting interferometry
    • D. Malacara, 2nd edition John Wiley & Sons Inc
    • J.E. Greivenkamp, and J.H. Bruning Phase shifting interferometry D. Malacara, Optical Shop Testing 2nd edition 1992 John Wiley & Sons Inc 501 598
    • (1992) Optical Shop Testing , pp. 501-598
    • Greivenkamp, J.E.1    Bruning, J.H.2
  • 2
    • 77956978378 scopus 로고
    • Phase-measurement interferometry techniques
    • E. Wolf, Elsevier
    • K. Creath Phase-measurement interferometry techniques E. Wolf, Progress in Optics vol. XXVI 1988 Elsevier 349 393
    • (1988) Progress in Optics , vol.26 , pp. 349-393
    • Creath, K.1
  • 3
    • 17644423213 scopus 로고
    • Step height measurement using two-wavelength phase-shifting interferometry
    • K. Creath Step height measurement using two-wavelength phase-shifting interferometry Appl Opt 26 1987 2810 2816
    • (1987) Appl Opt , vol.26 , pp. 2810-2816
    • Creath, K.1
  • 4
    • 33847692334 scopus 로고    scopus 로고
    • Two-wavelength interferometry profilometry with a phase-step error - Compensating algorithm
    • 115602-1-3
    • J Schmit, and P. Hariharan Two-wavelength interferometry profilometry with a phase-step error - compensating algorithm Opt Eng 45 2006 115602-1-3
    • (2006) Opt Eng , vol.45
    • Schmit, J.1    Hariharan, P.2
  • 5
    • 0015667946 scopus 로고
    • Two wavelength interferometry
    • C. Polhemus Two wavelength interferometry Appl Opt 12 1973 2071 2073
    • (1973) Appl Opt , vol.12 , pp. 2071-2073
    • Polhemus, C.1
  • 6
    • 0037327769 scopus 로고    scopus 로고
    • Red-green-blue interferometer for the metrology of discontinuous structures
    • A Pfortner, and J. Schwider Red-green-blue interferometer for the metrology of discontinuous structures Appl Opt 42 2003 667 673
    • (2003) Appl Opt , vol.42 , pp. 667-673
    • Pfortner, A.1    Schwider, J.2
  • 7
    • 0022001763 scopus 로고
    • Multiple-wavelength phase-shifting interferometry
    • YY Cheng, and JC. Wyant Multiple-wavelength phase-shifting interferometry Appl Opt 24 1985 804 807
    • (1985) Appl Opt , vol.24 , pp. 804-807
    • Cheng, Y.Y.1    Wyant, J.C.2
  • 8
    • 67749093111 scopus 로고    scopus 로고
    • Measurement of discontinuous surfaces using multiple-wavelength interferometry
    • [073603-1-073603-8]
    • U. Paul Kumar, N. Krishna Mohan, and MP. Kothiyal Measurement of discontinuous surfaces using multiple-wavelength interferometry Opt Eng 48 2009 [073603-1-073603-8]
    • (2009) Opt Eng , vol.48
    • Kumar, U.P.1    Mohan, N.K.2    Kothiyal, M.P.3
  • 9
    • 84906876958 scopus 로고
    • Surface profiling by analysis of white-light interferograms in the spatial frequency domain
    • P de Groot, and L. Deck Surface profiling by analysis of white-light interferograms in the spatial frequency domain J Mod Opt 42 1995 389 401
    • (1995) J Mod Opt , vol.42 , pp. 389-401
    • De Groot, P.1    Deck, L.2
  • 10
    • 0027654026 scopus 로고
    • Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms
    • P de Groot, and L. Deck Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms Opt Lett 18 1993 1462 1464
    • (1993) Opt Lett , vol.18 , pp. 1462-1464
    • De Groot, P.1    Deck, L.2
  • 11
    • 0030126002 scopus 로고    scopus 로고
    • High resolution profilometry using phase calculation algorithms for spectroscopic analysis of white light interferograms
    • P Sandoz, G Tribillon, and H. Perrin High resolution profilometry using phase calculation algorithms for spectroscopic analysis of white light interferograms J Mod Opt 43 1996 701 708
    • (1996) J Mod Opt , vol.43 , pp. 701-708
    • Sandoz, P.1    Tribillon, G.2    Perrin, H.3
  • 12
    • 35448952534 scopus 로고    scopus 로고
    • Experimental study of the phase-shift miscalibration error in phase shifting interferometry: Use of a spectrally resolved white-light interferometer
    • SK Debnath, and MP. Kothiyal Experimental study of the phase-shift miscalibration error in phase shifting interferometry: use of a spectrally resolved white-light interferometer Appl Opt 46 2006 5103 5109
    • (2006) Appl Opt , vol.46 , pp. 5103-5109
    • Debnath, S.K.1    Kothiyal, M.P.2
  • 13
    • 0020128359 scopus 로고
    • A digital phase measurement system for real-time holographic interferometry
    • P. Hariharan, B.F. Oreb, and N. Brown A digital phase measurement system for real-time holographic interferometry Opt Commun 41 1982 393 396
    • (1982) Opt Commun , vol.41 , pp. 393-396
    • Hariharan, P.1    Oreb, B.F.2    Brown, N.3
  • 14
    • 0001767220 scopus 로고    scopus 로고
    • Windows function influence on phase error in phase shifting algorithms
    • J Schmit, and K. Creath Windows function influence on phase error in phase shifting algorithms Appl Opt 35 1996 5642 5649
    • (1996) Appl Opt , vol.35 , pp. 5642-5649
    • Schmit, J.1    Creath, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.