Z-axis optomechanical accelerometer

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 615-619

  Hutchison, D N ^a   Bhave, S A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EFFECTIVE REFRACTIVE INDEX; OPTICAL MODES; OPTICAL PATH LENGTHS; OPTICAL QUALITY FACTOR; OPTICAL RESONANCE; OPTOMECHANICAL; PROOF MASS; Z-AXIS ACCELEROMETER;

MEMS; NATURAL FREQUENCIES; OPTICAL RESONATORS; QUANTUM OPTICS; SILICON NITRIDE;

ACCELEROMETERS;

EID: 84860491255     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170263     Document Type: Conference Paper

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