A silicon nitride optomechanical oscillator with zero flicker noise

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 19-22

  Tallur, S ^a   Sridaran, S ^a   Bhave, S A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP-SCALE; FLICKER NOISE; GRATING COUPLERS; HIGHER ORDER; OPTICAL QUALITY FACTOR; OPTOMECHANICAL; RADIATION PRESSURE;

PHASE NOISE; SILICON NITRIDE;

MEMS;

EID: 84860461221     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170083     Document Type: Conference Paper

References (10)

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