Gas sensing properties of RF magnetron sputtered MgIn 2O 4 thin films

Sensors and Actuators, A: Physical

Volumn 179, Issue , 2012, Pages 98-104

  Anuradha, B ^a   Sanjeeviraja, C ^a  

^a ALAGAPPA UNIVERSITY   (India)

Author keywords

Ethanol sensor; Gas sensing properties; Magnetron sputtering; MgIn 2O 4 thin films

Indexed keywords

ETHANOL SENSORS; FABRICATION PARAMETERS; GAS SENSING PROPERTIES; GLASS SUBSTRATES; HALL MEASUREMENTS; HIGH SENSITIVITY; N-TYPE CONDUCTIVITY; RF MAGNETRON SPUTTERING TECHNIQUE; RF MAGNETRONS; SENSING CHARACTERISTICS; SPUTTERING POWER; SUBSTRATE TEMPERATURE; XRD;

CHEMICAL DETECTION; CRYSTAL STRUCTURE; ELECTRON MOBILITY; ETHANOL; GAS DETECTORS; MAGNETRON SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS;

THIN FILMS;

EID: 84860375264     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.03.039     Document Type: Article

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