Free radical kinetics in a plasma immersion ion implanted polystyrene: Theory and experiment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 280, Issue , 2012, Pages 26-35

  Kosobrodova, Elena A ^a   Kondyurin, Alexey V ^a   Fisher, Keith ^b   Moeller, Wolfhard ^c   McKenzie, David R ^a   Bilek, Marcela M M ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

^b UNIVERSITY OF SYDNEY   (Australia)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Ion implantation; Polystyrene; Radical kinetics

Indexed keywords

EPR SIGNALS; EPR SPECTRA; EXPERIMENTAL DATA; ION FLUENCES; ION IMPLANTED; LINEAR DIFFERENTIAL EQUATION; NONLINEAR BEHAVIOURS; PLASMA IMMERSION; PLASMA IMMERSION ION IMPLANTATION; RADICAL KINETICS; ROOM TEMPERATURE; SHARP INCREASE; TREATMENT TIME;

DIFFERENTIAL EQUATIONS; ELECTRON SPIN RESONANCE SPECTROSCOPY; ION IMPLANTATION; KINETICS; MAGNETIC RESONANCE; PARAMAGNETISM; PLASMA APPLICATIONS; POLYSTYRENES;

FREE RADICALS;

EID: 84860278778     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2012.02.028     Document Type: Article

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