Accelerated oxidation of silicon due to x-ray irradiation

Proceedings of the European Conference on Radiation and its Effects on Components and Systems, RADECS

Volumn , Issue , 2011, Pages 77-79

  Bhandaru, Shweta ^a   Zhang, En Xia ^b   Fleetwood, Daniel M ^b   Reed, Robert A ^b   Weller, Robert A ^b   Weiss, Sharon M ^b  

^a VANDERBILT UNIVERSITY   (United States)

^b VANDERBILT UNIVERSITY   (United States)

Author keywords

oxide; ozone; Silicon; x ray detection

Indexed keywords

HIGH ENERGY X RAY; OXIDE GROWTH; X RAY IRRADIATION; X-RAY DETECTIONS;

IRRADIATION; OXIDES; OZONE; RADIATION EFFECTS; SILICON; X RAYS;

SILICON OXIDES;

EID: 84860166300     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RADECS.2011.6131371     Document Type: Conference Paper

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