Strong second-harmonic generation in silicon nitride films

Applied Physics Letters

Volumn 100, Issue 16, 2012, Pages

  Ning, Tingyin ^a   Pietarinen, Henna ^a   Hyvärinen, Outi ^a   Simonen, Janne ^a   Genty, Goëry ^a   Kauranen, Martti ^a  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

FUSED SILICA SUBSTRATES; NONLINEAR CRYSTALS; ON CHIPS; ORDERS OF MAGNITUDE; POTASSIUM DIHYDROGEN PHOSPHATE; QUARTZ CRYSTAL; SECOND-ORDER NONLINEAR OPTICAL; SILICON NITRIDE FILM;

CHEMICAL VAPOR DEPOSITION; NANOPHOTONICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POTASSIUM; QUARTZ;

SILICON NITRIDE;

EID: 84859995936     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4704159     Document Type: Article

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