Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis

Journal of Microelectromechanical Systems

Volumn 21, Issue 2, 2012, Pages 324-330

  Oka, Tetsuhiro ^a   Itani, Koichi ^a   Taguchi, Yoshihiro ^a   Nagasaka, Yuji ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

Concentration distribution; diffusion coefficient; laser induced dielectrophoresis (LIDEP); microelectromechanical systems (MEMS); micromirror

Indexed keywords

CONCENTRATION DISTRIBUTIONS; DESIGN VALUE; DIFFRACTED LIGHT; DIFFUSION PHENOMENA; EXCITATION DEVICES; EXCITATION SYSTEM; FINITE ELEMENT METHODS (FEM); FRESNEL MIRRORS; HIGH-SPEED; INTERFERENCE FRINGE; LASER INDUCED; MASS DIFFUSION; MICRO MIRROR; OPTICAL DIFFUSION; SMALL SAMPLES;

DIFFUSION; ELECTROMECHANICAL DEVICES; ELECTROPHORESIS; FINITE ELEMENT METHOD; INTERFEROMETRY; MEMS; MICROCHANNELS; MIRRORS; SENSORS;

LASER EXCITATION;

EID: 84859728269     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2176922     Document Type: Article

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