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Volumn 29, Issue 4, 2009, Pages 313-320
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The fast-moving world of MEMS technology
a
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Author keywords
Actuators; Electronic engineering; MEMS; Sensors; Silicon
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Indexed keywords
ASSEMBLY TECHNIQUES;
DESIGN/METHODOLOGY/APPROACH;
ELECTRONIC ENGINEERING;
MEMS SENSORS;
MEMS TECHNOLOGY;
POWER MEMS;
SEMICONDUCTOR MANUFACTURES;
SILICON MEMS;
TECHNICAL REVIEWS;
TECHNIQUES USED;
ACTUATORS;
FABRICATION;
MICROELECTROMECHANICAL DEVICES;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICES;
SENSORS;
TECHNOLOGY;
MEMS;
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EID: 73849085719
PISSN: 01445154
EISSN: None
Source Type: Journal
DOI: 10.1108/01445150910987718 Document Type: Article |
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Times cited : (8)
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References (0)
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