Preparation of titania solid films by laser CVD using CO2 laser

Key Engineering Materials

Volumn 508, Issue , 2012, Pages 279-282

  Gao, Ming ^a   Ito, Akihiko ^a   Tu, Rong ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Laser CVD; Microstructure; Solid film

Indexed keywords

CARBON DIOXIDE; CARBON DIOXIDE LASERS; CHEMICAL VAPOR DEPOSITION; DEPOSITION RATES; MICROSTRUCTURE; OXIDE MINERALS; TITANIUM DIOXIDE;

CHAMBER PRESSURE; DEPOSITION TEMPERATURES; FACETED SURFACES; LASER CHEMICAL VAPOR DEPOSITION; LASER CVD; PHASE AND MICROSTRUCTURES; RUTILE TIO2; SOLID FILMS;

FILM PREPARATION;

EID: 84859703224     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/KEM.508.279     Document Type: Conference Paper

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