Selective electroless silver plating of three dimensional SU-8 microstructures on silicon for metamaterials applications

Optical Materials Express

Volumn 1, Issue 8, 2011, Pages 1548-1554

  Yan, Yuanjun ^a   Ibnur Rashad, M ^a   Teo, E J ^b   Tanoto, Hendrix ^b   Teng, Jinghua ^b   Bettiol, Andrew A ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; ELECTROLESS PLATING; LITHOGRAPHY; METAMATERIALS; PHOTONS; PHOTORESISTS; SURFACE ROUGHNESS; SILICON;

ELECTROLESS SILVER PLATINGS; HIGH CONDUCTIVITY; LOW SURFACE ROUGHNESS; RADIO FREQUENCY PLASMA; RESIN MODIFICATION; SELECTIVE COATINGS; SU-8 MICROSTRUCTURES; TWO-PHOTON LITHOGRAPHY;

SILVER; TWO PHOTON PROCESSES;

EID: 84859607959     PISSN: None     EISSN: 21593930     Source Type: Journal    
DOI: 10.1364/OME.1.001548     Document Type: Article

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