Large-area fabrication of equidistant free-standing Si crystals on nanoimprinted glass

Physica Status Solidi - Rapid Research Letters

Volumn 5, Issue 10-11, 2011, Pages 376-378

  Sontheimer, Tobias ^a   Rudigier Voigt, Eveline ^b   Bockmeyer, Matthias ^b   Klimm, Carola ^a   Schubert Bischoff, Peter ^a   Becker, Christiane ^a   Rech, Bernd ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b SCHOTT AG   (Germany)

Author keywords

Nanoimprinting; Nanostructures; Silicon; Solar cells; Thin films

Indexed keywords

ABSORPTION PROPERTY; AMORPHOUS SI; CELL ARCHITECTURES; ELECTRON BEAM EVAPORATION; FEATURE SIZES; HIGH-RATE DEPOSITION; LOW COST FABRICATION; NANO-IMPRINTING; PERIODIC ARRAYS; PRECISE CONTROL; PREPARATION PROCESS; SELECTIVE ETCH; SI CRYSTALS; SOLID PHASE CRYSTALLIZATION;

AMORPHOUS SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON;

PHOTONIC CRYSTALS;

EID: 80155156959     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.201105437     Document Type: Article

References (15)

1. H. A. Atwater and A. Polman, Nature Mater. 9, 205 (2010).
2. B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, Nature 449, 885 (2007).
3. S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and J. Bur, Nature Mater. 394, 251 (1998). A. Birner, R. B. Wehrspohn, U. M. Gösele, and K. Busch, Adv. Mater. 13, 377(2001).
4. J. Zhu, C. Hsu, Z. Yu, S. Fan, and Y. Cui, Nano Lett. 10, 1979 (2010).
5. M. D. Kelzenberg, S. W. Boettcher, J. A. Petykiewicz, D. B. Turner-Evans, M. C. Putman, E. L. Warren, J. M. Spurgeon, R. M. Briggs, N. S. Lewis, and H. A. Atwater, Nature Mater. 9, 239 (2010).
6. Z. Huang, H. Fang, and J. Zhu, Adv. Mater. 19, 744 (2007).
7. T. Shimizu, T. Xie, Jo Nishikawa, S. Shingubara, S. Senz, and U. Gösele, Adv. Mater. 19, 917 (2007).
8. C. Battaglia, J. Escarré, K. Söderström, M. Charrière, M. Despeisse, F.-J. Haug, and C. Ballif, Nature Photon. 5, 535 (2011).
9. L. J. Guo, J. Phys. D, Appl. Phys. 37, R123 (2004).
10. E. Rudigier-Voigt, M. Bockmeyer, V. Hagemann, and S. Bauer, in: Proc. of the 24th European Photovoltaics Solar Energy Conference, Hamburg, Germany 2009, p. 2884.
11. M. A. Green, K. Emery, Y. Hishikawa, and W. Warta, Prog. Photovolt., Res. Appl. 19, 84 (2011).
12. R. Egan, M. Keevers, U. Schubert, T. Young, R. Evans, S. Partlin, M. Wolf, J. Schneider, D. Hogg, B. Eggleston, M. Green, F. Falk, A. Gawlik, G. Andrä, M. Werner, C. Hagendorf, P. Dogan, T. Sontheimer, and S. Gall, in: Proc. of 24th European Photovoltaic Solar Energy Conference, Hamburg, Germany 2009, p. 2280.
13. T. Sontheimer, C. Becker, U. Bloeck, S. Gall, and B. Rech, Appl. Phys. Lett. 95, 101902 (2009).
14. C. Spinella, S. Lombardo, and F. Priolo, J. Appl. Phys. 84, 10 (1998).
15. A. G. Dirks and H. J. Leamy, Thin Solid Films 47, 219 (1977).