Diffractive shaping of excimer-laser beams for pulsed laser deposition

Journal of the European Optical Society

Volumn 6, Issue , 2011, Pages 48-

  Kekkonen, V ^a   Hakola, A ^b   Kajava, T ^a  

^a AALTO UNIVERSITY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Beam splitter grating; Flat top profile; Partial coherence; Top hat profile

Indexed keywords

EXCIMER LASERS; GALLIUM ALLOYS; LASER BEAMS; MANGANESE ALLOYS; OPTICAL INSTRUMENTS; PRISMS; PULSED LASER DEPOSITION; TERNARY ALLOYS;

BEAM SHAPING SYSTEMS; BEAM-SPLITTER GRATINGS; DIFFRACTIVE BEAM SPLITTER; FLAT-TOP; FLAT-TOP PROFILES; FLUENCES; PARTIAL COHERENCE; TOP HAT;

PULSED LASERS;

EID: 84858207727     PISSN: None     EISSN: 19902573     Source Type: Journal    
DOI: 10.2971/jeos.2011.11013s     Document Type: Article

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