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Volumn 21, Issue 2, 2012, Pages

The impact of Langmuir probe geometries on electron current collection and the integral relation for obtaining electron energy distribution functions

Author keywords

[No Author keywords available]

Indexed keywords

ARBITRARY GEOMETRY; CYLINDRICAL GEOMETRY; ELECTRON CURRENT COLLECTION; ELECTRON CURRENTS; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; GEOMETRIC DIFFERENCE; INTEGRAL RELATIONS; LANGMUIRS; NON-MAXWELLIAN DISTRIBUTION; PROBE CURRENTS; PROBE GEOMETRY; SPHERICAL PROBES;

EID: 84857991436     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/21/2/025003     Document Type: Article
Times cited : (7)

References (20)
  • 1
    • 0029371042 scopus 로고
    • Electron distribution functions in a sputtering magnetron discharge
    • Sheridan T E, Goeckner M J and Goree J 1995 Electron distribution functions in a sputtering magnetron discharge Japan. J. Appl. Phys. 34 497782
    • (1995) Japan. J. Appl. Phys. , vol.34 , Issue.PART 1 , pp. 4977-4982
    • Sheridan, T.E.1    Goeckner, M.J.2    Goree, J.3
  • 2
    • 21644480371 scopus 로고
    • The theory of collectors in gaseous discharges
    • Mott-Smith H M and Langmuir I 1926 The theory of collectors in gaseous discharges Phys. Rev. 28 72763
    • (1926) Phys. Rev. , vol.28 , pp. 727-763
    • Mott-Smith, H.M.1    Langmuir, I.2
  • 3
    • 34250930966 scopus 로고
    • Der Niedervoltbogen
    • Druyvesteyn M J 1930 Der Niedervoltbogen Z. Phys. 64 78198
    • (1930) Z. Phys. , vol.64 , pp. 781-798
    • Druyvesteyn, M.J.1
  • 4
    • 0041923355 scopus 로고
    • Electron energy distributions in plasmas i
    • Boyd R L F and Twiddy N D 1959 Electron energy distributions in plasmas I Proc. R. Soc. Lond. A 250 5369
    • (1959) Proc. R. Soc. Lond. , vol.250 , pp. 53-69
    • Boyd, R.L.F.1    Twiddy, N.D.2
  • 5
    • 64249152204 scopus 로고    scopus 로고
    • A Langmuir probe system incorporating the Boyd-Twiddy method for EEDF measurement applied to an inductively coupled plasma source
    • Crowley B and Dietrich S 2008 A Langmuir probe system incorporating the Boyd-Twiddy method for EEDF measurement applied to an inductively coupled plasma source Plasma Sources Sci. Technol. 18 014010
    • (2008) Plasma Sources Sci. Technol. , vol.18
    • Crowley, B.1    Dietrich, S.2
  • 6
    • 85007669270 scopus 로고
    • Comparison of theory and experiment for ion collection by spherical and cylindrical probes in a collisional plasma
    • Thornton J A 1971 Comparison of theory and experiment for ion collection by spherical and cylindrical probes in a collisional plasma AIAA J. 9 342
    • (1971) AIAA J. , vol.9 , pp. 342
    • Thornton, J.A.1
  • 9
    • 0000567274 scopus 로고
    • Probe methods in plasma research
    • Kagan Y M and Perel V I 1964 Probe methods in plasma research Sov. Phys.Usp. 6 76793
    • (1964) Sov. Phys.Usp. , vol.6 , pp. 767-793
    • Kagan, Y.M.1    Perel, V.I.2
  • 10
    • 49249148566 scopus 로고
    • Electron reflection in probe analysis of plasmas
    • Emeleus K G 1979 Electron reflection in probe analysis of plasmas Phys. Lett. A 71 2312
    • (1979) Phys. Lett. , vol.71 , pp. 231-232
    • Emeleus, K.G.1
  • 11
    • 32844470542 scopus 로고    scopus 로고
    • Effect of finite length on the current-voltage characteristic of a cylindrical Langmuir probe in a multidipole plasma chamber
    • DOI 10.1088/0963-0252/15/1/013, PII S0963025206073762
    • Hoskinson A R and Hershkowitz N 2006 Effect of finite length on the currentvoltage characteristic of a cylindrical Langmuir probe in a multidipole plasma chamber Plasma Sources Sci. Technol. 15 8590 (Pubitemid 43254130)
    • (2006) Plasma Sources Science and Technology , vol.15 , Issue.1 , pp. 85-90
    • Hoskinson, A.R.1    Hershkowitz, N.2
  • 12
    • 33744948946 scopus 로고    scopus 로고
    • Method to find the electron distribution function from cylindrical probe data
    • Knappmiller S, Robertson S and Sternovsky Z 2006 Method to find the electron distribution function from cylindrical probe data Phys. Rev. E 73 066402
    • (2006) Phys. Rev. , vol.73
    • Knappmiller, S.1    Robertson, S.2    Sternovsky, Z.3
  • 14
    • 76949106223 scopus 로고    scopus 로고
    • Electron energy distribution function extraction using integrated step function response and regularization methods
    • El Saghir A, Kennedy C and Shannon S 2010 Electron energy distribution function extraction using integrated step function response and regularization methods IEEE Trans. Plasma Sci. 38 15662
    • (2010) IEEE Trans. Plasma Sci. , vol.38 , pp. 156-162
    • El Saghir, A.1    Kennedy, C.2    Shannon, S.3
  • 15
    • 78651338623 scopus 로고    scopus 로고
    • Reduction of EEDF measurement distortion in regularized solutions of the druyvesteyn relation
    • El Saghir A and Shannon S 2011 Reduction of EEDF measurement distortion in regularized solutions of the druyvesteyn relation IEEE Trans. Plasma Sci. 39 596602
    • (2011) IEEE Trans. Plasma Sci. , vol.39 , pp. 596-602
    • El Saghir, A.1    Shannon, S.2
  • 16
    • 79957692235 scopus 로고    scopus 로고
    • Probe measurements of electron energy distributions in plasmas: What can we measure and how can we achieve reliable results?
    • Godyak V and Demidov V 2011 Probe measurements of electron energy distributions in plasmas: what can we measure and how can we achieve reliable results? J. Phys. D: Appl. Phys. 44 233001
    • (2011) J. Phys. D: Appl. Phys. , vol.44
    • Godyak, V.1    Demidov, V.2
  • 18
    • 0036860942 scopus 로고    scopus 로고
    • Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma
    • DOI 10.1088/0963-0252/11/4/320, PII S0963025202545813
    • Godyak V A, Piejak R B and Alexandrovich B M 2002 Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma Plasma Sources Sci. Technol. 11 52543 (Pubitemid 35433995)
    • (2002) Plasma Sources Science and Technology , vol.11 , Issue.4 , pp. 525-543
    • Godyak, V.A.1    Piejak, R.B.2    Alexandrovich, B.M.3
  • 19
    • 0035248792 scopus 로고    scopus 로고
    • On the effect of the electron energy distribution on the plasma parameters of an argon discharge: A global (volume-averaged) model study
    • DOI 10.1088/0963-0252/10/1/310
    • Gudmundsson J T 2001 On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume averaged) model study Plasma Sources Sci. Technol. 10 7681 (Pubitemid 32252870)
    • (2001) Plasma Sources Science and Technology , vol.10 , Issue.1 , pp. 76-81
    • Gudmundsson, J.T.1
  • 20
    • 80053598634 scopus 로고    scopus 로고
    • Optical diagnostics for characterization of electron energy distributions: Argon inductively coupled plasmas
    • Boffard J B et al 2011 Optical diagnostics for characterization of electron energy distributions: argon inductively coupled plasmas Plasma Souces Sci. Technol. 20 055006
    • (2011) Plasma Souces Sci. Technol. , vol.20
    • Boffard, J.B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.