Sputtering of tungsten by N + and N 2 + ions: Investigations of molecular effects

Physica Scripta T

Volumn T145, Issue , 2011, Pages

  Dobes, K ^a   Naderer, P ^a   Lachaud, N ^a   Eisenmenger Sittner, C ^b   Aumayr, F ^a  

^a ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY TRANSFER MODELS; EXPERIMENTAL DATA; ION ENERGIES; MOLECULAR EFFECT; MOLECULAR IONS; NITROGEN ATOM; POLYCRYSTALLINE; QUARTZ CRYSTAL MICROBALANCE TECHNIQUES; SPUTTERING YIELDS; TOTAL SPUTTERING YIELD;

ENERGY TRANSFER; MATERIALS SCIENCE; POLYCRYSTALLINE MATERIALS; SPUTTERING; TUNGSTEN;

IONS;

EID: 84857541477     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2011/T145/014017     Document Type: Conference Paper

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