SCOPUS 정보 검색 플랫폼

Volumn 269, Issue 11, 2011, Pages 1276-1279

Molecular size effect in the chemical sputtering of a-C:H thin films by low energy H+, H2+, and H3+ ions

Author keywords

a C:H thin films; Carbon based materials; Chemical erosion; Divertor materials; Ion surface collisions; Sputtering

Indexed keywords

A-C:H THIN FILM; CARBON-BASED MATERIALS; CHEMICAL EROSION; DIVERTOR MATERIALS; ION-SURFACE COLLISIONS;

ELLIPSOMETRY; EROSION; IONS; MASS SPECTROMETRY; METHANE; THIN FILMS;

CARBON FILMS;

EID: 79957685492 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/j.nimb.2010.12.071 Document Type: Article

Times cited : (3)

References (16)

1
- 0033690658
- M. Balden, and J. Roth J. Nucl. Mater. 280 2000 39
- (2000) J. Nucl. Mater. , vol.280 , pp. 39
- Balden, M.¹ Roth, J.²

2
- 79957778125
- G. Federici Phys. Scr. 1 2006 T124
- (2006) Phys. Scr. , vol.1 , pp. 124
- Federici, G.¹

3
- 62749124107
- R. Behrisch, W. Eckstein (Eds.) Springer, Berlin
- W. Jacob, J. Roth, in: R. Behrisch, W. Eckstein (Eds.), Sputtering by Particle Bombardment: Experiments and Computer Simulations from Threshold to MeV, Springer, Berlin, 2007 pp. 329-400.
- (2007) Sputtering by Particle Bombardment: Experiments and Computer Simulations from Threshold to MeV , pp. 329-400
- Jacob, W.¹ Roth, J.²

4
- 33749358288
- L.I. Vergara, F.W. Meyer, H.F. Krause, P. Träskelin, K. Nordlund, and E. Salonen J. Nucl. Mater. 357 2006 9
- (2006) J. Nucl. Mater. , vol.357 , pp. 9
- Vergara, L.I.¹ Meyer, F.W.² Krause, H.F.³ Träskelin, P.⁴ Nordlund, K.⁵ Salonen, E.⁶

5
- 79957670930
- doi: 10.1016/j.jnucmat.2010.08.037
- F.W. Meyer, P.R. Harris, H. Zhang, W. Jacob, T. Schwarz-Selinger, U. von Toussaint, J. Nucl. Mater. (2010) doi: 10.1016/j.jnucmat.2010.08.037.
- (2010) J. Nucl. Mater.
- Meyer, F.W.¹ Harris, P.R.² Zhang, H.³ Jacob, W.⁴ Schwarz-Selinger, T.⁵ Von Toussaint, U.⁶

6
- 79051470393
- P.S. Krstic, C.O. Reinhold, and S.J. Stuart Europhys. Lett. 77 2007 33002
- (2007) Europhys. Lett. , vol.77 , pp. 33002
- Krstic, P.S.¹ Reinhold, C.O.² Stuart, S.J.³

7
- 84856284359
- C.O. Reinhold, P.S. Krstic, S.J. Stuart, H. Zhang, P.R. Harris, and F.W. Meyer J. Nucl. Mater 401 2010 1
- (2010) J. Nucl. Mater , vol.401 , pp. 1
- Reinhold, C.O.¹ Krstic, P.S.² Stuart, S.J.³ Zhang, H.⁴ Harris, P.R.⁵ Meyer, F.W.⁶

8
- 27744548955
- L.I. Vergara, F.W. Meyer, and H.F. Krause J. Nucl. Mater. 347 2005 118
- (2005) J. Nucl. Mater. , vol.347 , pp. 118
- Vergara, L.I.¹ Meyer, F.W.² Krause, H.F.³

9
- 34147188569
- F.W. Meyer, H. Zhang, L.I. Vergara, and H.F. Krause Nucl. Instrum. Methods Phys. Res. B 258 2007 264
- (2007) Nucl. Instrum. Methods Phys. Res. B , vol.258 , pp. 264
- Meyer, F.W.¹ Zhang, H.² Vergara, L.I.³ Krause, H.F.⁴

10
- 67349276628
- H. Zhang, and F.W. Meyer J. Nucl. Mater. 390 2009 127
- (2009) J. Nucl. Mater. , vol.390 , pp. 127
- Zhang, H.¹ Meyer, F.W.²

11
- 0001112707
- V.A. Morozov, and F.W. Meyer Rev. Sci. Instrum. 70 1999 4515
- (1999) Rev. Sci. Instrum. , vol.70 , pp. 4515
- Morozov, V.A.¹ Meyer, F.W.²

12
- 77949297197
- P.R. Harris, and F.W. Meyer Rev. Sci. Instrum. 81 2010 02A310
- (2010) Rev. Sci. Instrum. , vol.81
- Harris, P.R.¹ Meyer, F.W.²

13
- 0001188118
- T. Schwarz-Selinger, A. von Keudell, and W. Jacob J. Appl. Phys. 86 1999 3988
- (1999) J. Appl. Phys. , vol.86 , pp. 3988
- Schwarz-Selinger, T.¹ Von Keudell, A.² Jacob, W.³

14
- 79957694344
- S. Cernusca, H.P. Winter, F. Aumayr, R. Díez Muiňo, and J.I. Juaristi Nucl. Instrum. Methods Phys. Res. B 1 2003 203
- (2003) Nucl. Instrum. Methods Phys. Res. B , vol.1 , pp. 203
- Cernusca, S.¹ Winter, H.P.² Aumayr, F.³ Díez Muiňo, R.⁴ Juaristi, J.I.⁵

15
- 46549085014
- H. Zhang, F.W. Meyer, H.M. Meyer III, and M.J. Lance Vacuum 82 2008 1285
- (2008) Vacuum , vol.82 , pp. 1285
- Zhang, H.¹ Meyer, F.W.² Meyer III, H.M.³ Lance, M.J.⁴

16
- 41749107724
- F.W. Meyer, H. Zhang, M.J. Lance, and H.F. Krause Vacuum 82 2008 880
- (2008) Vacuum , vol.82 , pp. 880
- Meyer, F.W.¹ Zhang, H.² Lance, M.J.³ Krause, H.F.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.