|
Volumn 22, Issue 9, 2011, Pages
|
Groove depth measurements on roughness reference standards of the Croatian National Laboratory for Length (LFSB)
|
Author keywords
nanometrology; reproducibility; roughness standards
|
Indexed keywords
MEASUREMENT THEORY;
MEASUREMENTS;
MEASURING EQUIPMENTS;
NANOMETROLOGY;
NATIONAL LABORATORY;
NATIONAL METROLOGY INSTITUTES;
PRECISE MEASUREMENTS;
PRODUCTION TECHNOLOGY;
REPRODUCIBILITIES;
ROUGHNESS STANDARDS;
STANDARDS;
|
EID: 80051705400
PISSN: 09570233
EISSN: 13616501
Source Type: Journal
DOI: 10.1088/0957-0233/22/9/094020 Document Type: Article |
Times cited : (5)
|
References (15)
|