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Volumn 22, Issue 9, 2011, Pages

Groove depth measurements on roughness reference standards of the Croatian National Laboratory for Length (LFSB)

Author keywords

nanometrology; reproducibility; roughness standards

Indexed keywords

MEASUREMENT THEORY; MEASUREMENTS;

EID: 80051705400     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094020     Document Type: Article
Times cited : (5)

References (15)
  • 4
    • 0036976665 scopus 로고    scopus 로고
    • The evaluation of key comparison data
    • Cox M G 2002 The evaluation of key comparison data Metrologia 39 589
    • (2002) Metrologia , vol.39 , Issue.6 , pp. 589
    • Cox, M.G.1
  • 7
    • 2042528018 scopus 로고    scopus 로고
    • Comparison on nanometrology: Nano 2 - Step height
    • Koenders L et al 2003 Comparison on nanometrology: nano 2 - step height Metrologia 40 04001
    • (2003) Metrologia , vol.40 , Issue.1 A , pp. 04001
    • Koenders, L.1
  • 9
    • 85034764221 scopus 로고    scopus 로고
    • Working Group on Dimensional Metrology
    • Working Group on Dimensional Metrology 2002 CCL/WGDM/02-55 http://www.bipm.org/utils/common/pdf/WGDM2002.pdf
    • (2002)
  • 12
    • 80051674205 scopus 로고    scopus 로고
    • European Nanotechnology Gateway
    • European Nanotechnology Gateway 2006 Eighth Nanoforum Report Nanometrology
    • (2006)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.