Acoustic wave based MEMS devices for biosensing applications

Biosensors and Bioelectronics

Volumn 33, Issue 1, 2012, Pages 1-9

  Voiculescu, Ioana ^a   Nordin, Anis Nurashikin ^b  

^a CITY COLLEGE OF NEW YORK   (United States)

^b INTERNATIONAL ISLAMIC UNIVERSITY MALAYSIA   (Malaysia)

Author keywords

Biosensor; Film bulk acoustic wave resonators (FBAR); Mass sensitivity; MEMS; SAW delay line; Surface acoustic waves (SAW) resonator

Indexed keywords

ACOUSTIC WAVE DEVICE; BIO-CHEMICAL APPLICATIONS; BIOLOGICAL APPLICATIONS; BIOSENSING APPLICATIONS; DELAY TIME; FILM BULK ACOUSTIC WAVE RESONATORS (FBAR); FILM BULK ACOUSTIC-WAVE RESONATORS; FUNCTIONALIZATIONS; MASS SENSITIVITY; MEMS FABRICATION; MEMSDEVICES; MICRO FLUIDIC SYSTEM; MONITORING CHANGE; POWER CONSUMPTION REDUCTION; QUALITY FACTORS; SAW DELAY LINE; SAW RESONATORS; SENSING AREAS; SENSING LAYERS; SURFACE ACOUSTIC WAVES (SAW) RESONATOR; SURFACE ACOUSTIC WAVES RESONATORS; TECHNOLOGY PLATFORMS; VISCOSITY VARIATIONS; WAVE PROPERTIES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ELECTRIC DELAY LINES; FLUIDIC DEVICES; INTEGRATION; MEMS; NATURAL FREQUENCIES; RESONATORS; WAVE FILTERS; WAVES;

BIOSENSORS;

BIOASSAY; BIOSENSOR; COATED PARTICLE; FILM BULK ACOUSTIC WAVE RESONATOR; FREQUENCY MODULATION; INTEGRATED CIRCUIT; MICROELECTROMECHANICAL SYSTEM; MICROFLUIDIC ANALYSIS; MICROTECHNOLOGY; PIEZOELECTRICITY; PORTABLE EQUIPMENT; POWER SUPPLY; PROCESS DEVELOPMENT; PROCESS MONITORING; QUALITY CONTROL; REVIEW; SURFACE ACOUSTIC WAVE RESONATOR; SURFACE PROPERTY;

BIOSENSING TECHNIQUES; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MICROFLUIDICS; MINIATURIZATION; SOUND;

EID: 84857363887     PISSN: 09565663     EISSN: 18734235     Source Type: Journal    
DOI: 10.1016/j.bios.2011.12.041     Document Type: Review

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