Fabrication and characterization of a surface-acoustic-wave biosensor in cmos technology for cancer biomarker detection

IEEE Transactions on Biomedical Circuits and Systems

Volumn 4, Issue 1, 2010, Pages 62-73

  Tigli, Onur ^a   Bivona, Louis ^b   Berg, Patricia ^b   Zaghloul, Mona E ^c  

^a WASHINGTON STATE UNIVERSITY   (United States)

^b UNIVERSITY OF WASHINGTON   (United States)

^c George Washington University   (United States)

Author keywords

Biosensor; Cancer; Complementary metal x2013; oxide semiconductor (CMOS); Microelectromechanical systems (MEMS); Surface acoustic wave (SAW)

Indexed keywords

BOVINE SERUM ALBUMINS; BREAST CANCER; CANCER BIOMARKERS; CENTER FREQUENCY; CMOS TECHNOLOGY; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; EARLY DETECTION OF BREAST CANCER; FREQUENCY SENSITIVITY; FUNCTIONALIZED; GROWING DEMAND; LOW COSTS; MASS SENSITIVITY; MICROELECTROMECHANICAL SYSTEMS; MONITORING THERAPY; NOVEL SURFACES; OXIDE SEMICONDUCTOR; PERFORMANCE COMPARISON; SAW DEVICE; SAW SENSORS; SURFACE ACOUSTIC WAVE (SAW); SURFACE ACOUSTIC WAVES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ANTIGENS; BIOASSAY; BIOMARKERS; BODY FLUIDS; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; ELECTRIC CURRENTS; FABRICATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES;

BIOSENSORS;

EID: 76649109219     PISSN: 19324545     EISSN: None     Source Type: Journal    
DOI: 10.1109/TBCAS.2009.2033662     Document Type: Conference Paper

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