Vacuum-gapped film bulk acoustic resonator for low-loss mass sensing in liquid

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 156-159

  Pottigari, Sai Sumanth ^a   Kwon, Jae Wan ^a  

^a UNIVERSITY OF MISSOURI   (United States)

Author keywords

Film bulk acoustic resonator; Liquid mass sensing; Low loss

Indexed keywords

ACOUSTIC ENERGY; FILM BULK ACOUSTIC RESONATOR; FILM BULK ACOUSTIC RESONATORS; LIQUID ENVIRONMENT; LOW LOSS; MASS SENSING; NEW DESIGN; NOVEL DESIGN; Q-FACTORS; VACUUM GAP;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTICS; ACTUATORS; ENERGY DISSIPATION; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; Q FACTOR MEASUREMENT; RESONATORS; SOLID-STATE SENSORS; VACUUM;

LIQUIDS;

EID: 71449093747     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285541     Document Type: Conference Paper

References (7)

1. F. Teston, G. Feuillard, L. Tessier, and M. Lethiecq, "Mass sensitivity of acoustic plate mode in liquids," IEEE. Transaction on Ultrasonic. Ferroelectric and Frequency Control, vol. 45, no. 5, pp. 1266-1272, 1998.
2. H. Wohltjen, "Mechanism of operation and design considerations for surface acoustic wave device vapor sensors," Sensors and Actuators, Vol. 5, pp. 307-325, 1984
3. E. Gizeli, A.C. Stevenson, N.J. Goddard and C.R. Lowe, "A novel Love-plate acoustic sensor utilizing polymer overlayers," IEEE. Transaction on Ultrasonic. Ferroelectric and Frequency Control, vol. 39. pp.657-659, 1992
4. V.M. Mecea, "Loaded vibrating quartz sensors," Sensors and Actuators A, vol. 40, pp. 1-27, 1994.
5. H. Zhang and E.S Kim, "Micromachined Acoustic Resonant Mass Sensor," Journal of Microelectromechanical Systems, vol. 14, pp. 699-706, 2005.
6. H. Zhang, M.S. Marma, E.S. Kim, C.E. McKenna and M.E. Thompson, "Mercuric Ion Sensing by Film-Bulk-Acoustic-Resonator," IEEE. Transaction on Ultrasonic. Ferroelectric and Frequency Control, vol. 54, pp. 1723-1725, 2007.
7. G. Wingqvist, J. Bjurstrom, L. Liljeholm, V. Yantchev, and I. Katardjiev, "Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media," Sensors and Actuators B vol. 123, pp. 466-473, 2007.