Molecular beam epitaxy grown GeSn p-i-n photodetectors integrated on Si

Thin Solid Films

Volumn 520, Issue 8, 2012, Pages 3361-3364

  Werner, J ^a   Oehme, M ^a   Schirmer, A ^a   Kasper, E ^a   Schulze, J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Raman spectroscopy; Ge photodetector; GeSn Epitaxie

Indexed keywords

1550 NM; BAND GAP REDUCTION; GE DETECTORS; GEOMETRICAL DIMENSIONS; GESN EPITAXIE; LOW TEMPERATURE GROWTH; MESA STRUCTURE; MOLE FRACTION; OPTICAL MEASUREMENT; OPTICAL RESPONSIVITIES; P-I-N PHOTODETECTORS; RESPONSIVITY; SI SUBSTRATES; SUPER CONTINUUM;

EPITAXIAL GROWTH; GERMANIUM; MOLECULAR BEAM EPITAXY; OPTICAL DATA PROCESSING; RAMAN SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON; TIN;

PHOTODETECTORS;

EID: 84857059558     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.10.111     Document Type: Conference Paper

References (17)

1. R.F.C. Farrow, D.S. Robertson, G.M. Williams, A.G. Cullis, G.R. Jones, I.M. Young, and P.N.J. Dennis J. Cryst. Growth 54 1981 507
2. W. Wegscheider, K. Eberl, U. Menczigar, and G. Abstreiter Appl. Phys. Lett. 57 1990 875
3. S. Takeuchi, Y. Shimuraa, T. Nishimura, B. Vincent, G. Enemanc, T. Claryssec, J. Demeulemeester, A. Vantomme, J. Dekoster, M. Caymax, R. Loo, A. Sakai, O. Nakatsuka, and S. Zaima Solid State Electron. 60 2011 53
4. K. Alberi, J. Blacksberg, L.D. Bell, S. Nikzad, K.M. Yu, O.D. Dubon, and W. Walukievicz Phys. Rev. B 77 2008 073202
5. C.H.L. Goodman IEE Proc. 129 Pt. I 1982 189
6. J. Werner, M. Oehme, M. Schmid, M. Kaschel, A. Schirmer, E. Kasper, and J. Schulze Appl. Phys. Lett. 98 2011 061108
7. S. Su, B. Cheng, C. Xue, W. Wang, Q. Cao, H. Xue, W. Hu, G. Zhang, Y. Zuo, and Q. Wang Opt. Express 19 7 2011 6400
8. S. Klinger, M. Berroth, M. Kaschel, M. Oehme, and E. Kasper IEEE Photon. Technol. Lett. 21 2009 920
9. M. Oehme, J. Werner, M. Kaschel, O. Kirfel, and E. Kasper Thin Solid Films 517 2008 137
10. O.I. Dosunmu, D.D. Cannon, M.K. Emsley, L.C. Kimerling, and M.S. Unlu IEEE Photon. Technol. Lett. 17 2005 175
11. C.D. Thurmond, F.A. Trumbore, and M. Kowalchik J. Chem. Phys. 24 1956 799
12. J. Mathews, R. Roucka, J. Xie, S.-Q. Yu, J. Menendez, and J. Kouvetakis Appl. Phys. Lett. 95 2009 133506
13. J. Werner, M. Oehme, E. Kasper, and J. Schulze Thin Solid Films 518 2010 234
14. M. Oehme, J. Werner, M. Jutzi, G. Wöhl, E. Kasper, and M. Berroth Thin Solid Films 508 2006 393
15. M. Oehme, J. Werner, and E. Kasper J. Cryst. Growth 310 2008 4531
16. M. Jutzi, M. Berroth, G. Wöhl, M. Oehme, and E. Kasper IEEE Photon. Technol. Lett. 17 2005 1510
17. L. Vivien, J. Osmond, J.M. Fedeli, D. Marris-Morini, P. Crozat, J.F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval Opt. Express 17 2009 6252