Synthesis of SiC nano-powder from organic precursors using RF inductively coupled thermal plasma

Ceramics International

Volumn 38, Issue 3, 2012, Pages 1959-1963

  Ko, Sang Min ^a,b   Koo, Sang Man ^b   Cho, Woo Seok ^a   Hwnag, Kwang Take ^a   Kim, Jin Ho ^a  

^a Korea Institute of Ceramic Engineering and Technology (KICET)   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

A. Organic precursor; Nano powder; RF inductively coupled thermal plasma processing; Silicon carbide (SiC)

Indexed keywords

AMORPHOUS SILICA; BRUNAUER EMMETT TELLERS; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; FREE CARBON; HEXAMETHYLDISILAZANE; HF TREATMENT; HIGH TEMPERATURE; INDUCTION PLASMA; INDUCTIVELY-COUPLED; NANO POWDERS; ORGANIC PRECURSOR; RF INDUCTIVELY COUPLED THERMAL PLASMA PROCESSING; SPECIFIC SURFACE; TETRA-ETHYL-ORTHO-SILICATE; THERMAL PLASMA;

AMORPHOUS CARBON; ELECTROMAGNETIC INDUCTION; FIELD EMISSION MICROSCOPES; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; PLASMAS; SILICA; THERMAL CONDUCTIVITY; X RAY DIFFRACTION;

SILICON CARBIDE;

EID: 84857053595     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2011.10.028     Document Type: Article

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