Chemical capacitive sensing using ultrathin flexible nanoporous electrodes

Sensors and Actuators, B: Chemical

Volumn 162, Issue 1, 2012, Pages 22-26

  Kavalenka, Maryna N ^a   Striemer, Christopher C ^a,b   Desormeaux, Jon Paul S ^b   McGrath, James L ^a   Fauchet, Philippe M ^a  

^a University of Rochester   (United States)

^b SiMPore Inc   (United States)

Author keywords

Capacitive sensor; Nanocrystalline silicon; Porous membrane

Indexed keywords

ANALYTES; CAPACITIVE SENSING; CAPACITIVE SENSOR; CONDUCTIVE ELECTRODES; DEGREE OF SWELLING; MEMBRANE SYSTEM; NANOCRYSTALLINES; NANOPOROUS ELECTRODE; OPTICAL PROFILER; PARALLEL PLATES; POLYMER MATERIALS; POROUS ELECTRODES; POROUS MEMBRANES; SILICON SEMICONDUCTOR PROCESSING; THICK MEMBRANES; ULTRA-THIN; VAPOR PERMEATION; VAPOR SENSORS;

CAPACITIVE SENSORS; ELASTICITY; ELECTRODES; NANOCRYSTALLINE SILICON; SENSORS; VAPORS;

SEMICONDUCTING SILICON;

EID: 84856690986     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.11.076     Document Type: Article

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