Natively textured surface Al-doped ZnO-TCO layers with gradual oxygen growth for thin film solar cells via magnetron sputtering

Applied Surface Science

Volumn 258, Issue 8, 2012, Pages 4092-4096

  Chen, Xin Liang ^a   Wang, Fei ^a   Geng, Xin Hua ^a   Zhang, De Kun ^a   Wei, Chang Chun ^a   Zhang, Xiao Dan ^a   Zhao, Ying ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

Gradual oxygen growth; Magnetron sputtering; Natively textured surface; Solar cells; Zinc oxide thin films

Indexed keywords

ALUMINUM COATINGS; ALUMINUM OXIDE; CONDUCTIVE FILMS; FILM GROWTH; II-VI SEMICONDUCTORS; LIGHT SCATTERING; MAGNETRON SPUTTERING; OPTICAL FILMS; OXYGEN; REACTIVE SPUTTERING; SHEET RESISTANCE; SOLAR CELLS; SUBSTRATES; THIN FILM SOLAR CELLS; TRANSPARENT CONDUCTING OXIDES; ZINC OXIDE;

ALUMINUM DOPED ZINC OXIDES (ZNO:AL); GRADUAL OXYGEN GROWTHS; NATIVELY TEXTURED SURFACES; PULSED DIRECT CURRENT; REACTIVE MAGNETRON SPUTTERING; REACTIVE SPUTTERING PROCESS; TRANSPARENT CONDUCTIVE OXIDES; ZINC OXIDE THIN FILMS;

THIN FILMS;

EID: 84856224088     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.12.061     Document Type: Letter

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