As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering

Thin Solid Films

Volumn 520, Issue 12, 2012, Pages 4208-4213

  Zhang, Wendi ^a   Bunte, Eerke ^a   Ruske, Florian ^b   Köhl, Dominik ^c   Besmehn, Astrid ^a   Worbs, Janine ^a   Siekmann, Hilde ^a   Kirchhoff, Joachim ^a   Gordijn, Aad ^a   Hüpkes, Jürgen ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

^c RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Ion beam treatment; Magnetron sputtering; Solar cells; TCO; ZnO:Al films

Indexed keywords

AS-GROWN; GLASS SUBSTRATES; ION BEAM TREATMENT; LATERAL SIZES; LIGHT TRAPPING EFFECTS; MICROCRYSTALLINE SILICON THIN FILMS; NEAR INFRARED; OXYGEN IONS; PRE-TREATMENT; RF-MAGNETRON SPUTTERING; SPECTRAL RANGE; SURFACE TEXTURE FEATURES; TCO; TEXTURED ZINC OXIDE; ZNO:AL FILMS;

MAGNETRON SPUTTERING; METALLIC FILMS; OXIDE FILMS; SOLAR CELLS; SUBSTRATES;

ZINC OXIDE;

EID: 84856227417     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.04.098     Document Type: Conference Paper

References (14)

1. S. Faÿ, J. Steinhauser, N. Oliveira, E. Vallat-Sauvain, and C. Ballif Thin Solid Films 515 2007 8558
2. M. Creatore Volintiru, B.J. Kniknie, C.I.M.A. Spee, and M.C.M. van de Sanden J. Appl. Phys. 102 2007 043709
3. J. Hüpkes, J. Müller and B. Rech, Transparent conductive zinc oxide-basics and applications in thin film solar cells, ISBN 978-3-540-73611-0, 2008, p. 359-413.
4. T. Nakada, Y. Ohkubo, and A. Kunioka Jpn. J. Appl. Phys. 30 12A 1991 3344
5. T. Minami, H. Sato, S. Takata, N. Ogawa, and T. Mouri Jpn. J. Appl. Phys. 31 1922 1106
6. A. Shabalin, M. Amann, M. Kishinevsky, C. Quinn, and N. Capps Characterization of the Low-Voltage High-Current Single-Cell Ion Source, 43rd Annual Technical Conference of the Society of Vacuum Coaters 2000 283
7. S.V. Thomsen, R.H. Petrmichl, V.S. Veerasamy, A.V. Longobardo, H.A. Luten, D.R. Hall, US patent No.: US 6808606 B2, 2004.
8. J. Krč, M. Zeman, O. Kluth, F. Smole, and M. Topič Thin Solid Films 426 2003 296
9. Z. Lu, H. Xu, M. Xin, K. Li, and H. Wang J. Phys. Chem. C 114 2010 820
10. O. Kluth, C. Zahren, H. Stiebig, B. Rech, and H. Schade Proc. 19th European Photovoltaic Solar Energy Conference, Paris, France 2004 1587
11. H. Stiebig, M. Schulte, C. Zahren, C. Hasse, B. Rech, and P. Lechner Proc. SPIE 6197 2006 619701
12. Y. Nasuno, M. Kondo, and A. Matsuda Sol. Energy Mater. Sol. Cells 74 2002 497
13. L. Feitknecht, J. Steinhauser, R. Schlüchter, S. Faÿ, D. Dominé, E. Vallat-Sauvin, F. Meillaud, C. Ballif, and A. Shah Technical Digest of the 15th International Photovoltaic Solar Energy Conference vol. 1 2005 473
14. M. Python, E. Vallat-Sauvain, J. Bailat, D. Dominé, L. Fesquet, A. Shah, and C. Ballif J. Non-Cryst. Solids 354 2008 2258