Polycrystalline silicon thin films by high-rate electronbeam evaporation for photovoltaic applications - Influence of substrate texture and temperature

Energy Procedia

Volumn 10, Issue , 2011, Pages 61-65

  Becker, Christiane ^a   Sontheimer, Tobias ^a   Steffens, Simon ^a   Scherf, Simone ^a   Rech, Bernd ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Crystallization kinetics; Electron beam evaporation; Polycrystalline silicon; Thin film solar cells

Indexed keywords

AMORPHOUS SILICON LAYERS; CELL PREPARATION; COST-SAVING; DEPOSITION TECHNIQUE; DIRECT GROWTH; E BEAM EVAPORATION; ELECTRON BEAM EVAPORATION; ELEVATED TEMPERATURE; EVAPORATED SILICON; HIGH RATE; HIGH-QUALITY MATERIALS; HIGH-RATE DEPOSITION; HIGHER TEMPERATURES; LIGHT-TRAPPING; PHOTOVOLTAIC APPLICATIONS; PHOTOVOLTAIC PERFORMANCE; POLY-CRYSTALLINE SILICON; POLY-SI FILMS; POLY-SI THIN FILM; POLYCRYSTALLINE SILICON (POLY-SI); POLYCRYSTALLINE SILICON THIN FILM; ROUGH SURFACES; SMOOTH SUBSTRATES; SOLAR CELL PERFORMANCE; SOLID-PHASE CRYSTALLIZATION; SUBSTRATE MICROSTRUCTURE; SUBSTRATE TEXTURE; TEXTURED SUBSTRATES; THIN FILM FABRICATION; THIN FILM SOLAR CELL TECHNOLOGY; THIN FILM SOLAR CELLS; ZNO FILMS;

AMORPHOUS FILMS; AMORPHOUS MATERIALS; AMORPHOUS SILICON; CONVERSION EFFICIENCY; CRYSTALLIZATION KINETICS; DEPOSITION; EVAPORATION; NANOSTRUCTURED MATERIALS; PHASE TRANSITIONS; PHOTOVOLTAIC EFFECTS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SEMICONDUCTING SILICON COMPOUNDS; SOLAR POWER GENERATION; SUBSTRATES; TEXTURES; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

FILM PREPARATION;

EID: 84855694195     PISSN: 18766102     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.egypro.2011.10.153     Document Type: Conference Paper

References (9)

1. Matsuyama T, Terada N, Baba T, Sawada T, Tsuge S, Wakisaka K, Tsuda S. High-quality polycrystalline silicon thin film prepared by a solid phase crystallization method. J. Non-Cryst. Solids 1996;940:198-200
2. Green MA, Basore PA, Chang N, Clugston D, Egan R, Evans R, Hogg D, Jarnason S, Keevers M, Lasswell P, O'Sullivan J, Schubert U, Turner A, Wenham SR, Young T. Crystalline silicon on glass (CSG) thin-film solar cell modules. Sol. Energy 2004;77:857.
3. Sontheimer T, Becker C, Ruske F, Klimm C, Bloeck U, Gall S, Kunz O, Young T, Egan R, Hupkes J, Rech B. Challenges and opportunities of electron beam evaporation in the preparation of poly-Si thin film solar cells. Proceedings of the 35th IEEE Photovoltaic Specialists Conference, Hawaii, USA, 2010, p. 614-619.
4. Mattox DM. Handbook of physical vapor deposition (PVD) processing. Park Ridge, New Jersey: Noyes Publications; 1998
5. Werner M, Schubert U, Hagendorf C, Schneider J, Keevers M, Egan R. Thin film morphology, growth and defect structure of ebeam deposited silicon on glass. Proceedings of the 24th European Photovoltaic Solar Energy Conference, Hamburg, Germany, 2009, p. 2482-2485.
6. Becker C, Ruske F, Sontheimer T, Gorka B, Bloeck U, Gall S, Rech B. Microstructure and photovoltaic performance of polycrystalline silicon thin films on temperature-stable ZnO:Al layers. J. Appl.Phys. 2009;106:084506.
7. Sontheimer T, Becker C, Bloeck U, Gall S, Rech B. Crystallization kinetics in electron-beam evaporated amorphous silicon on ZnO:Al-coated glass for thin film solar cells. Appl.Phys.Lett. 2009;95:101902.
8. Secco d'Aragona F. Dislocation Etch for (100) Planes in Silicon. J. Electrochem. Soc. 1972;119:948.
9. Sontheimer T, Scherf S, Klimm C, Becker C, Rech B. Characterization and control of the solid phase crystallization kinetics of electron beam evaporated silicon for thin film solar cells. Accepted for publication in J.Appl.Phys. 2011.