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Volumn 258, Issue 7, 2012, Pages 2591-2596
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Effect of humidity and UV-assistance on the preparation of erbium doped alumina by aerosol MOCVD process
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Author keywords
Aerosol MOCVD; Er; Humidity; Structural and optical properties; Thin films; UV assistance
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Indexed keywords
ACTIVATION ENERGY;
AEROSOLS;
ALUMINA;
ALUMINUM OXIDE;
AMORPHOUS FILMS;
ATMOSPHERIC HUMIDITY;
DEPOSITION RATES;
ERBIUM;
ERBIUM ALLOYS;
FILM PREPARATION;
HUMIDITY CONTROL;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
ORGANIC CHEMICALS;
ORGANOMETALLICS;
OXIDE FILMS;
REFRACTIVE INDEX;
THIN FILMS;
ALUMINIUM OXIDE FILMS;
CONTROLLED HUMIDITIES;
DEPOSITION REACTIONS;
DEPOSITION TEMPERATURES;
METAL ORGANIC CHEMICAL VAPOUR DEPOSITIONS;
ORGANIC CONTAMINATION;
STRUCTURAL AND OPTICAL PROPERTIES;
UV ASSISTANCE;
ERBIUM COMPOUNDS;
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EID: 84855538696
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2011.10.100 Document Type: Article |
Times cited : (3)
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References (20)
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