Effect of humidity and UV assistance on the properties of erbium doped yttrium oxide films prepared by aerosol-MOCVD

Chemical Vapor Deposition

Volumn 17, Issue 4-6, 2011, Pages 93-97

  Salhi, Rached ^a   Roussel, Herve ^a   Chaudouët, Patrick ^a   Maalej, Ramzi ^c   Fourati, Mohieddine ^b   Deschanvres, Jean Luc ^a  

^a GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

^b UNIVERSITY OF SFAX   (Tunisia)

^c UNIVERSITY OF SFAX   (Tunisia)

Author keywords

Aerosol MOCVD; Er:Y2O3 films; Humidity; Optical properties; UV assisted synthesis

Indexed keywords

ACETYLACETONATES; AIR HUMIDITY; CARRIER GAS; CHEMICAL VAPOUR DEPOSITION; CUBIC STRUCTURE; ERBIUM DOPED; EXPERIMENTAL PARAMETERS; LOW HUMIDITY; LOW ORGANIC CONTAMINATIONS; METAL-ORGANIC; RELATIVE HUMIDITIES; STANDARD CONDITIONS; SUBSTRATE TEMPERATURE; UV ASSISTED SYNTHESIS;

ATMOSPHERIC AEROSOLS; CHEMICAL VAPOR DEPOSITION; DEPOSITION RATES; ERBIUM; FILM PREPARATION; HUMIDITY CONTROL; ORGANIC CHEMICALS; REFRACTIVE INDEX; YTTRIUM; YTTRIUM ALLOYS; YTTRIUM OXIDE;

OXIDE FILMS;

EID: 79958095393     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201006877     Document Type: Article

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