Microstructure and Mg concentration of Mg-Si thin film deposited by ion beam sputtering on glass substrate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 5, 2004, Pages 1971-1974

  Serikawa, T ^a   Henmi, M ^a   Kondoh, K ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; GRAIN BOUNDARIES; INTERMETALLICS; ION BEAM ASSISTED DEPOSITION; ION BEAMS; MAGNESIUM COMPOUNDS; MICROSTRUCTURE; SEGREGATION (METALLOGRAPHY); SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY;

COLUMNAR STRUCTURES; ENERGY DISPERSIVE X-RAY MEASUREMENT; GLASS SUBSTRATES; ION BEAM SPUTTERING;

THIN FILMS;

EID: 8444249312     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1778406     Document Type: Article

References (20)

1. H. Matsui, M. Kuramoto, T. Ono, Y. Nose, H. Matsuoka, and H. Kuwabara, J. Cryst. Growth 237-239, 2121 (2002).
2. T. Kajikawa, K. Shida, K. Shiraishi, T. Ito, M. Omori, and T. Hirai, Proceedings of the 16th International Conference on Thermoelectronics (IEEE, Picscataway, NJ, 1997), p. 362.
3. A. Vantomme, J. E. Mahan, G. Langouche, J. P. Becker, M. V. Bael, K. Temst, and C. V. Haesendonck, Appl. Phys. Lett. 70, 1086 (1997).
4. J. Tejeda and M. Cardona, Phys. Rev. B 14, 2559 (1976).
5. K. Kondoh, E. Yuasa, and T. Aizawa, Mater. Sci. Forum 419-422, 745 (2003).
6. K. Kondoh, H. Oginuma, E. Yuasa, and T. Aizawa, Mater. Trans., JIM 42, 1293 (2001).
7. K. Kondoh, H. Oginuma, A. Kimura, S. Matsukawa, and T. Aizawa, Mater. Trans., JIM 44, 981 (2003).
8. T. Tanaka, M. Suzuki, and K. Kawabata, Thin Solid Films 343-344, 57 (1999).
9. J. H. Hhan, A. Vantomme, and G. Langouche, Phys. Rev. B 54, 16965 (1996).
10. M. Wittmer, W. Luthy, and M. Von. Allmen, Phys. Lett. 75A, 127 (1979).
11. S. W. Song, J. Electrochem. Soc. 150, A121 (2003).
12. T. Hosono, Y. Matsuzawa, M. Kuramoto, Y. Momose, H. Tatsuoka, and H. Kuwabara, Solid State Phenom. 93, 447 (2003).
13. K. Higuchi, H. Kajioka, K. Toiyama, H. Fujii, S. Orimo, and Y. Kikuchi, J. Alloys Compd. 293-295, 484 (1999).
14. D. W. Hoffmann and J. A. Thornton, J. Vac. Sci. Technol. 14, 164 (1977).
15. J. A. Thornton, J. Tabock, and D. W. Hoffman, Thin Solid Films 64, 111 (1979).
16. Selected Values of the Thermodynamic Properties of the Elements, edited by R. Hultgren et al. (American Society of Metals, Metals Park, OH, 1973).
17. M. J. Frederick, R. Goswami, and G. Ramanath, J. Appl. Phys. 93, 5966 (2003).
18. Binary Alloy Phase Diagrams, edited by T. B. Massalski (American Society of Metals, Metal Parks, OH, 1990).
19. L. Lu, M. O. Lai, and M. L. Hoe, Nanostruct. Mater. 10, 551 (1998).
20. L. Lu, M. O. Lai, W. B. Xue, and S. Y. Ng, Z. Metallkd. 91, 952 (2000).