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Volumn 237-239, Issue 1-4 III, 2002, Pages 2121-2124

Growth of Ca2Si layers on Mg2Si/Si(1 1 1) substrates

Author keywords

A1. Diffusion; A1. Interfaces; A1. Surface processes; B2. Semiconducting silicon compounds

Indexed keywords

FREE ENERGY; HEAT TREATMENT; INTERDIFFUSION (SOLIDS); INTERFACES (MATERIALS); MAGNESIUM COMPOUNDS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE PHENOMENA; TRANSMISSION ELECTRON MICROSCOPY; VAPOR PHASE EPITAXY; X RAY DIFFRACTION ANALYSIS;

EID: 0036530634     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)02276-X     Document Type: Article
Times cited : (44)

References (16)
  • 2
    • 0001277029 scopus 로고
    • R.T. Tung, K. Maex, P.W. Pellegrini, L.H. Allen (Eds.), Silicide Thin Films - Fabrication, Properties, and Applications
    • (1995) Mater. Res. Soc. Symp. , vol.402 , pp. 307
    • Lange, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.