Making a hybrid microfluidic platform compatible for in situ imaging by vacuum-based techniques

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 6, 2011, Pages

  Yang, Li ^a   Yu, Xiao Ying ^a   Zhu, Zihua ^b   Thevuthasan, Theva ^b   Cowin, James P ^a,c  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^c NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS SURFACES; DETECTION WINDOWS; FABRICATION STRATEGIES; IN-SITU; KEY FEATURE; MICROFLUIDIC PLATFORMS; SMALL APERTURE; TEMPERATURE DROPS; THEORETICAL CALCULATIONS; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY; VACUUM COMPATIBILITY; VACUUM TECHNIQUES; WATER VAPORIZATION;

MICROFLUIDICS; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY;

VACUUM;

EID: 84255192272     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3654147     Document Type: Article

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