Direct synthesis of ZnO nanowires on nanopatterned surface by magnetron sputtering

Chemical Vapor Deposition

Volumn 17, Issue 10-12, 2011, Pages 337-341

  El Mel, Abdel Aziz ^a   Buffière, Marie ^a   Massuyeau, Florian ^a   Gautron, Eric ^a   Xu, Wei ^b   Choi, Chang Hwan ^b   Wéry, Jany ^a   Faulques, Eric ^a   Barreau, Nicolas ^a   Tessier, Pierre Yves ^a  

^a UNIVERSITÉ DE NANTES   (France)

^b Stevens Institute of Technology   (United States)

Author keywords

Lithography; Nanowires; Photoluminescence; Sputtering; ZnO

Indexed keywords

DEEP REACTIVE ION ETCHING; DEPOSITION PROCESS; DIRECT SYNTHESIS; HIGH RESOLUTION; LASER INTERFERENCE LITHOGRAPHY; LINE PATTERN; NANO GRAINS; NANOMETRICS; NANOPATTERNED SURFACES; PHOTOLUMINESCENCE SPECTRUM; PREFERENTIAL ORIENTATION; SILICON SURFACES; ZNO; ZNO NANOWIRE ARRAYS; ZNO NANOWIRES;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; LITHOGRAPHY; MICROSTRUCTURE; PHOTOLUMINESCENCE; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

NANOWIRES;

EID: 83755221169     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201106920     Document Type: Article

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