Optimization of white light interferometry on rough surfaces based on error analysis

Optik

Volumn 115, Issue 8, 2004, Pages 351-357

  Saraç, Zehra ^a,b   Groß, Reinhard ^b   Richter, Claus ^b   Wiesner, Bernhard ^b   Häusler, Gerd ^b  

^a GEBZE TECHNICAL UNIVERSITY   (Turkey)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Measuring uncertainty; White light interferometry

Indexed keywords

ALGORITHMS; CHARGE COUPLED DEVICES; ERROR ANALYSIS; GAUSSIAN NOISE (ELECTRONIC); LIGHT EMITTING DIODES; MATHEMATICAL MODELS; MICROSTRUCTURE; SURFACE ROUGHNESS;

EVALUATION ALGORITHMS; MEASURING UNCERTAINTY; SIGNAL GENERATION; WHITE LIGHT INTERFEROMETRY (WLI);

INTERFEROMETRY;

EID: 8344263131     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1078/0030-4026-00369     Document Type: Article

References (11)

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