Roughness parameters and surface deformation measured by "coherence radar"

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3407, Issue , 1998, Pages 133-140

  Ettl, P ^a   Schmidt, B ^a   Schenk, M ^a   Laszlo, I ^a   Hausler G ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Coherence radar; Deformation measurement; Rough surfaces; Roughness; Surface topology; White light interferometry

Indexed keywords

DATA ACQUISITION; DEFORMATION; FOURIER TRANSFORMS; INTERFEROMETRY; RADAR SYSTEMS; SPECKLE; STATISTICAL METHODS;

COHERENCE RADAR; MICROTOPOGRAPHY;

SURFACE ROUGHNESS;

EID: 0032224141     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.323304     Document Type: Conference Paper

References (7)

1. Three-dimensional sensing of rough surfaces by coherence radar
2. Laser speckle and related phenomena
3. About the scaling behavior of optical range sensors
4. New modifications of the coherence radar
5. Phase measurements using the mirau correlation microscope