Vapor-liquid-solid growth of Ge nanowhiskers enhanced by high-temperature glancing angle deposition

Applied Physics Letters

Volumn 99, Issue 22, 2011, Pages

  Suzuki, Motofumi ^a   Hamachi, Kenji ^a   Hara, Hideki ^a   Nakajima, Kaoru ^a   Kimura, Kenji ^a   Hsu, Chia Wei ^b   Chou, Li Jen ^b  

^a KYOTO UNIVERSITY   (Japan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION ANGLE; GLANCING ANGLE DEPOSITION; HIGH TEMPERATURE; KINETIC GROWTH; SUBSTRATE TEMPERATURE; VAPOR FLUXES; VAPOR PHASE GROWTH; VAPOR-LIQUID-SOLID GROWTH; VLS GROWTH;

CHEMICAL BEAM EPITAXY; CHEMICAL VAPOR DEPOSITION; GERMANIUM; LIQUIDS; MOLECULAR BEAM EPITAXY; NANOWHISKERS; VAPORS;

CRYSTAL WHISKERS;

EID: 82955194665     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3664777     Document Type: Article

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