Design of a co-integrated CMOS/NEMS oscillator with a simple electronic circuit

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Volumn , Issue , 2010, Pages 368-371

  Arndt, Gregory ^a   Colinet, Eric ^a   Juillard, Jerome ^b  

^a CEA LETI   (France)

^b SUPELEC   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE TRANSISTORS; COINTEGRATION; ELECTRONIC CIRCUITS; ELECTROSTATIC ACTUATION; FEEDBACK CIRCUITS; MECHANICAL DISPLACEMENTS; MONOLITHICALLY INTEGRATED; NON-LINEARITY; OUTPUT SIGNAL; OUTPUT VOLTAGES; PIEZORESISTIVE DETECTION; PROPOSED ARCHITECTURES; STABLE OSCILLATIONS; THEORETICAL STUDY;

DESIGN; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MONOLITHIC INTEGRATED CIRCUITS; SENSOR ARRAYS;

OSCILLATORS (ELECTRONIC);

EID: 77957827564     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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