SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 90, Issue , 2012, Pages 29-32

Sensitivity study of surface stress biosensors based on ultrathin Si membranes

(2) Tsouti, Vasiliki a,b Chatzandroulis, Stavros a

a INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY (Greece)

b Terma Patriarchou Grigoriou (Greece)

Author keywords

Biosensors; Finite element analysis; Surface stress

Indexed keywords

ANALYTICAL EQUATIONS; BIOLOGICAL SENSING; CAPACITIVE READOUT; COMPLICATED STRUCTURES; GEOMETRICAL PARAMETERS; SENSITIVITY STUDIES; SENSOR PERFORMANCE; STRUCTURE CHARACTERISTIC; SURFACE STRESS; ULTRA-THIN;

FINITE ELEMENT METHOD; MEMBRANES; NANOCANTILEVERS; SENSOR ARRAYS; STRUCTURAL DESIGN; SURFACE PROPERTIES;

BIOSENSORS;

EID: 82555194142 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2011.04.061 Document Type: Conference Paper

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.