Deflection, frequency, and stress characteristics of rectangular, triangular, and step profile microcantilevers for biosensors

Sensors

Volumn 9, Issue 8, 2009, Pages 6046-6057

  Ansari, Mohd Zahid ^a   Cho, Chongdu ^a  

^a Inha University   (South Korea)

Author keywords

Biosensor; Deflection; Microcantilever; Resonant frequency; Surface stress

Indexed keywords

ANSYS MULTIPHYSICS; CROSS-SECTION SHAPES; FINITE ELEMENT CODES; FREQUENCY CHARACTERISTIC; MICRO-CANTILEVERS; MICROCANTILEVER BIOSENSORS; STRESS CHARACTERISTICS; SURFACE STRESS;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DEFLECTION (STRUCTURES); FINITE ELEMENT METHOD; NANOCANTILEVERS; NATURAL FREQUENCIES; SURFACE PROPERTIES;

BIOSENSORS;

EID: 70349640368     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s90806046     Document Type: Article

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