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Scripta Materialia

Volumn 66, Issue 3-4, 2012, Pages 182-185

Self-elongated growth of nanopores in annealed amorphous Ta 2O5 films

(6) Nakamura, R a Tanaka, K a Ishimaru, M a Sato, K b Konno, T J b Nakajima, H a

a OSAKA UNIVERSITY (Japan)

b TOHOKU UNIVERSITY (Japan)

Author keywords

Amorphous; Crystallization; Nanoporous; Oxides; Self assembly

Indexed keywords

ANISOTROPIC CRYSTALS; NANO-POROUS; NANO-VOIDS; ORTHORHOMBIC STRUCTURES; TRANSMISSION ELECTRON;

AMORPHOUS MATERIALS; ANISOTROPY; CRYSTAL STRUCTURE; CRYSTALLIZATION; NANOPORES; OXIDES; SELF ASSEMBLY; TANTALUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS FILMS;

EID: 82255192060 PISSN: 13596462 EISSN: None Source Type: Journal
DOI: 10.1016/j.scriptamat.2011.10.033 Document Type: Article

Times cited : (6)

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