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Applied Physics Letters

Volumn 99, Issue 21, 2011, Pages

Surface acoustic wave micromotor with arbitrary axis rotational capability

(4) Tjeung, Ricky T a Hughes, Mark S a Yeo, Leslie Y a Friend, James R a

a MONASH UNIVERSITY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN FREQUENCIES; ELLIPTICAL MOTION; INTERDIGITAL ELECTRODE; LASER DOPPLER VIBROMETRY; LEAD ZIRCONATE TITANATE; MAXIMUM OUTPUT POWER; MICROMOTOR; ORTHOGONAL AXES; PIEZOELECTRIC SUBSTRATES; PRELOADS; ROTARY MOTOR; ROTATIONAL CAPABILITY; ROTATIONAL MOTION; ROTATIONAL SPEED; SURFACE ACOUSTIC WAVES; SURFACE ELEMENTS; SURFACE VIBRATION;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; JOINTS (ANATOMY); LASER DOPPLER VELOCIMETERS; PIEZOELECTRIC MOTORS; PIEZOELECTRICITY; ROTATION; SEMICONDUCTING LEAD COMPOUNDS; SUBSTRATES;

ACOUSTIC WAVE PROPAGATION;

EID: 81855228640 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3662931 Document Type: Article

Times cited : (10)

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