Performance estimation of surface acoustic wave motor using simulation model of friction drive

Electronics and Communications in Japan, Part III: Fundamental Electronic Science (English translation of Denshi Tsushin Gakkai Ronbunshi)

Volumn 88, Issue 1, 2005, Pages 37-47

  Asai, Katsuhiko ^a   Kurosawa, Minoru Kuribayashi ^b  

^a PANASONIC CORPORATION   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Actuator; Contact analysis; Friction drive; MEMS; Surface acoustic wave

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; FRICTION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; VIBRATIONS (MECHANICAL); WEAR OF MATERIALS;

CONTACT ANALYSIS; FRICTION DRIVE; SURFACE ACOUSTIC WAVES (SAW);

SURFACE WAVES;

EID: 7044264513     PISSN: 10420967     EISSN: None     Source Type: Journal    
DOI: 10.1002/ecjc.20079     Document Type: Article

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