Control of pore size for superior ultralow dielectrics

Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011

Volumn 1, Issue , 2011, Pages 562-565

  Kang, Il Yong ^a   Song, Seung Hyun ^a   Rhee, Hee Woo ^a  

^a Sogang University   (South Korea)

Author keywords

Mechanical properties; Nanoporous ultralow dielectrics; Pore morphologies; Reactive porogen

Indexed keywords

GI-SAXS; LARGE PORE SIZE; MATRIX; NANO-POROUS; NANOPOROUS DIELECTRICS; PORE MORPHOLOGY; POROGEN LOADING; POROGENS; SILANOLS; ULTRA-LOW DIELECTRIC; ULTRALOW K-MATERIALS;

CONDENSATION REACTIONS; DIELECTRIC MATERIALS; GLUCOSE; HYDROSILYLATION; MICROELECTRONICS; MORPHOLOGY; NANOTECHNOLOGY; PORE SIZE; STRUCTURE (COMPOSITION); SUGAR SUBSTITUTES;

MECHANICAL PROPERTIES;

EID: 81455144945     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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