A large electrodeless plasma reactor as a source of radicals

IEEE Transactions on Plasma Science

Volumn 39, Issue 11 PART 1, 2011, Pages 2508-2509

  Zaplotnik, Rok ^a   Vesel, Alenka ^a   Mozetic, Miran ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Discharge; dissociation fraction; E and H mode; large plasma reactor; recombination

Indexed keywords

DISCHARGE POWER; DISCHARGE REACTORS; DISCHARGE SYSTEMS; DISSOCIATION FRACTION; DISSOCIATION FRACTIONS; E AND H MODES; ELECTRODELESS; HETEROGENEOUS SURFACE; LARGE PLASMA REACTOR; LOW PRESSURE PLASMA; PLASMA REACTORS; PUMPING SPEED; RADIO FREQUENCY DISCHARGES; RECOMBINATION;

DISCHARGE (FLUID MECHANICS); DISSOCIATION; PLASMA APPLICATIONS; PLASMAS;

ELECTRIC DISCHARGES;

EID: 81255184945     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2011.2159729     Document Type: Article

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