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IEEE Transactions on Plasma Science
Volumn 39, Issue 11 PART 1, 2011, Pages 2582-2583
Dynamics of HiPIMS discharge operated in oxygen
Author keywords

High power impulse magnetron sputtering (HiPIMS); magnetron sputtering; optical emission spectroscopy; optical filters; pulsed plasmas
Indexed keywords

HIGH-POWER; HIGH-POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); OPTICAL EMISSIONS; OXYGEN SPECIES; PLASMA IMAGING; PULSED PLASMA; PURE OXYGEN;
EID: 81255168238     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2011.2150248     Document Type: Article
Times cited : (10)
References (5)
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  • 2
    • 78349304724 scopus 로고    scopus 로고
    • Time-and species-resolved plasma imaging as a new diagnostic approach for HiPIMS discharge characterization
    • Nov.
    • M. Hála, O. Zabeida, B. Baloukas, J. E. Klemberg-Sapieha, and L. Martinu, "Time-and species-resolved plasma imaging as a new diagnostic approach for HiPIMS discharge characterization", IEEE Trans. Plasma Sci., vol. 38, no. 11, pp. 3035-3039, Nov. 2010.
    • (2010) IEEE Trans. Plasma Sci. , vol.38 , Issue.11 , pp. 3035-3039
    • Hála, M.1    Zabeida, O.2    Baloukas, B.3    Klemberg-Sapieha, J.E.4    Martinu, L.5
  • 3
    • 77749280171 scopus 로고    scopus 로고
    • Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time-and space-resolved optical emission spectroscopy and fast imaging
    • Feb.
    • M. Hala, N. Viau, O. Zabeida, J. E. Klemberg-Sapieha, and L. Martinu, "Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time-and space-resolved optical emission spectroscopy and fast imaging", J. Appl. Phys., vol. 107, no. 4, p. 043305, Feb. 2010.
    • (2010) J. Appl. Phys. , vol.107 , Issue.4 , pp. 043305
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  • 4
    • 0032690466 scopus 로고    scopus 로고
    • Cold-cathode discharges and breakdown in argon: Surface and gas phase production of secondary electrons
    • Aug.
    • A. V. Phelps and Z. L. Petrovic, "Cold-cathode discharges and breakdown in argon: Surface and gas phase production of secondary electrons", Plasma Sources Sci. Technol., vol. 8, no. 3, p. R21, Aug. 1999.
    • (1999) Plasma Sources Sci. Technol. , vol.8 , Issue.3
    • Phelps, A.V.1    Petrovic, Z.L.2
  • 5
    • 78649752556 scopus 로고    scopus 로고
    • Spatial and temporal investigation of high power pulsed magnetron discharges by optical 2D-imaging
    • Dec.
    • B. Liebig, N. S. J. Braithwaite, P. J. Kelly, and J. W. Bradley, "Spatial and temporal investigation of high power pulsed magnetron discharges by optical 2D-imaging", Thin Solid Films, vol. 519, no. 5, pp. 1699-1704, Dec. 2010.
    • (2010) Thin Solid Films , vol.519 , Issue.5 , pp. 1699-1704
    • Liebig, B.1    Braithwaite, N.S.J.2    Kelly, P.J.3    Bradley, J.W.4

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.